Electronic
Pressure Measurement

Ultra High Purity Transducer, Ex nA nL
Models WU-20, WU-25 and WU-26

Fig. left Transducer WU-20, Single End
Fig. right Transducer WU-25, Flow Through
Fig. right Transducer WU-26, Modular Surface Mount

Applications

Gas panels for OEM tools
Semiconductor, flat panel display and photovoltaic production
Specialty and bulk-gas distribution

Special Features

High accuracy pressure measurement 0.15% RSS (or 0.3% BFSL)
Vacuum referenced pressure readings
Excellent long term stability
Signal noise cancellation and shielding
2.4711/UNSR 30003 thin film sensor
Active temperature compensation
Hermetically sealed (NEMA4 / IP67)
ATEX Zone 2
RoHS compliant
Compact design

Description

Reliable

The WU-2x series combines state of the art digital transducer concepts with analog-like output signals, in order to provide the safest and most accurate pressure measurements necessary for today’s demanding market requirements.

Vacuum referenced pressure readings, integrated signal noise cancellation and shielding features ensure high accuracy pressure measurement and excellent long term
stability. Active temperature compensation routines reduce the transducers impact to changing temperatures, allowing safer operations involving purge-vent cycling of high Joule-Thomson effect gases.

Flow through (WU-25) and surface mount (WU-26) series transducers are specifically designed and manufactured to sustain torsion applied stresses often incurred during installation. The special design of our thin film sensor eliminates the risk of sensor signal error due to influenced loads at the pressure connection or welded joints.

Versatile
The WU-2X can be readily installed in indoor or outdoor systems as well as in non-flammable or potentially flammable areas. Compliance to the most stringent standards(NEMA4, IP67, RoHS) improves install base flexibility and
acceptance worldwide.

The hermetically sealed design of the WU-2X prevents entry of moisture when used outdoors. Non-incendive (ATEX) approvals for potentially flammable environments provide essential safeguards for life and product safety. A T6 temperature class designator complies to the highest measurement requirements for low, spontaneous ignition temperature medias (i.e., phosphine (PH3) and silane (SiH4).

Compact
The ultra compact design of the WU-2X is the smallest product footprint in the market today. The space saving design easily replaces competitive transducers, making it the perfect fit for new equipment and retrofit projects.

技术参数 型号WU-20 WU-25 WU-26

Signal output and allowed load

Dimensions in inch [mm] WU-20

Dimensions in inch [mm] WU-25





Process connection variants WU-25

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